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Nano-Scale Analysis Using Synchrotron-Radiation: Applications in the Semiconductor Industry

Journal: Current Nanoscience
Volume: 4 Issue: 3 Year: 2008 Page: 256-266
Author(s): Ehrenfried Zschech, Holm Geisler, Jochen Rinderknecht, Gerd Schneider, Ralph Spolenak, Dieter Schmeisser

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