Optimized V-Shaped Beam Micro-Electrothermal Actuator Using Particle Swarm Optimization (PSO) Technique

Author(s): Salah Eldeen Osman , Musaab Zarog* .

Journal Name: Micro and Nanosystems

Volume 11 , Issue 1 , 2019

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Abstract:

Background: Electrothermal microactuators are very promising for wide range of Microelectromechanical Systems (MEMS) applications due to the low voltage requirement and large force produced.

Method: A new optimized V-beam electrothermal micro actuator was implemented in variable optical attenuator. In this work, Particle Swarm Optimization (PSO) technique is proposed to design the Vshaped beam.

Result: The approach has successfully improved both angular displacement & output force of the microactuator. Entropy generation rate was used as optimization criteria.

Keywords: PSO, entropy, variable optical attenuator, microactuators, RF MEMS, genetic algorithms.

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Article Details

VOLUME: 11
ISSUE: 1
Year: 2019
Page: [62 - 67]
Pages: 6
DOI: 10.2174/1876402911666190208162346

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