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Micro and Nanosystems


ISSN (Print): 1876-4029
ISSN (Online): 1876-4037

Review Article

MEMS Applications of NiTi Based Shape Memory Alloys: A Review

Author(s): Mehrshad Mehrpouya* and Hossein Cheraghi Bidsorkhi

Volume 8 , Issue 2 , 2016

Page: [79 - 91] Pages: 13

DOI: 10.2174/1876402908666161102151453

Price: $65


Shape Memory Alloys (SMAs), famous class of smart materials with unique functional and intelligence properties, have attracted much attention in recent decades. These materials offer a potential solution for microstructure devices due to their high mechanical performances, high power to weight ratio, large deformation, biocompatibility, etc. Nickel-Titanium (NiTi) is the most applied SMAs thin film due to its high recoverable strain and massive forces. Therefore, these high-performance materials are able to make microactuators in Micro-Electro-Mechanical System (MEMS). This paper investigates the recent development of material processing approaches for NiTi thin films and introduces various types of MEMS applications such as microvalves, micropumps, microgrippers, microsensors, etc.

Keywords: MEMS, thin films, SMAs, NiTi, TWSME, alloys.

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