Abstract
Traditionally plasma systems have required high operating power, low operating pressure and are relatively large in size, limiting the technology to mostly immobile, large-scale industrial applications. In recent years, microplasma devices have emerged due especially to improvements in microchip fabrication technology. Microplasmas improve on plasma performance, allow for atmospheric operation, permit portability and significantly reduce both the cost of manufacturing and the cost of electrical power. These developments allow for technological improvements in fields such as displays, medicine, alternate energy and chemical analysis. This review will first introduce the concept of man-made plasmas and the distinctive characteristics of microplasmas, then discuss some of the most recent patents of microplasmas with specific regard to devices possessing a microcavity. These patents relate to device types, fabrication improvements and the various applications of microplasma technology.
Keywords: Discharge devices, gas discharge, micro hollow cathode devices, microcavity, microfabrication, microplasma, nanofabrication, plasma
Call for Papers in Thematic Issues
Advanced Experimental, Computational Fluid Dynamics and Intelligent Computing Techniques on Complex Multiphase Flow Problems
Computational fluid dynamics (CFD) and Intelligent computing are very emerging technology in various industrial applications. Multiphase flow problems are very dominant in hydro as well as power plants, mining, marine, cementing, food processing, and ore-processing industries. Multiphase flows include gas-solid as well as liquid-solid flows. The solid like ores, ash, ...read more
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Hydrogen storage and production materials: Developing high-performance hydrogen generation and storage materials, as well as researching the mechanism of hydrogen-material interaction. The emphasis for supercapacitors is on carbon-based materials derived from various biomass carbonization methods, as well as carbon-containing electrode materials such as metal sulfide, oxides, and other similar compounds. ...read more
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Computational Methods in Engineering
In recent decades, computational methods have revolutionized the field of engineering, playing a pivotal role in enhancing efficiency, accuracy, and innovation across various disciplines. This proposed thematic issue aims to explore and showcase the latest advancements, challenges, and applications of computational methods in engineering. As technology continues to evolve, computational ...read more
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