Abstract
Wafer-Handling robot, an indispensable device in the Integrated Circuits manufacturing, can transfer and align wafers during the different working procedures. It has high speed, high reliability and super precision, and the utility of it realizes the automation and least contamination in wafer productions. This paper reviews various recent patents in all types of the wafer-handling robots including frog-leg robots, SCARA robots and four-bar linkage robots, and introduces the mechanisms and functions of them in detail. The list of the patents reviewed is by no means complete or extensive, while it shows however the extent of the subjects covered in patents in this area during several years from 2001 up to now. The paper concludes a description of the future development expected in the subjects covered.
Keywords: Wafer-handling, robotics, integrated circuits, frog-leg robots, SCARA robots, four-bar linkage
Recent Patents on Engineering
Title: Wafer-Handling Robots and Applications
Volume: 3 Issue: 3
Author(s): Ming Cong and Dongmei Cui
Affiliation:
Keywords: Wafer-handling, robotics, integrated circuits, frog-leg robots, SCARA robots, four-bar linkage
Abstract: Wafer-Handling robot, an indispensable device in the Integrated Circuits manufacturing, can transfer and align wafers during the different working procedures. It has high speed, high reliability and super precision, and the utility of it realizes the automation and least contamination in wafer productions. This paper reviews various recent patents in all types of the wafer-handling robots including frog-leg robots, SCARA robots and four-bar linkage robots, and introduces the mechanisms and functions of them in detail. The list of the patents reviewed is by no means complete or extensive, while it shows however the extent of the subjects covered in patents in this area during several years from 2001 up to now. The paper concludes a description of the future development expected in the subjects covered.
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Cite this article as:
Cong Ming and Cui Dongmei, Wafer-Handling Robots and Applications, Recent Patents on Engineering 2009; 3 (3) . https://dx.doi.org/10.2174/187221209789117762
DOI https://dx.doi.org/10.2174/187221209789117762 |
Print ISSN 1872-2121 |
Publisher Name Bentham Science Publisher |
Online ISSN 2212-4047 |
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