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Micro and Nanosystems


ISSN (Print): 1876-4029
ISSN (Online): 1876-4037

Research Article

Optimized V-Shaped Beam Micro-Electrothermal Actuator Using Particle Swarm Optimization (PSO) Technique

Author(s): Salah Eldeen Osman and Musaab Zarog*

Volume 11, Issue 1, 2019

Page: [62 - 67] Pages: 6

DOI: 10.2174/1876402911666190208162346


Background: Electrothermal microactuators are very promising for wide range of Microelectromechanical Systems (MEMS) applications due to the low voltage requirement and large force produced.

Method: A new optimized V-beam electrothermal micro actuator was implemented in variable optical attenuator. In this work, Particle Swarm Optimization (PSO) technique is proposed to design the Vshaped beam.

Result: The approach has successfully improved both angular displacement & output force of the microactuator. Entropy generation rate was used as optimization criteria.

Keywords: PSO, entropy, variable optical attenuator, microactuators, RF MEMS, genetic algorithms.

Graphical Abstract
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