Abstract
In recent years, microelectromechanical systems (MEMS) have been widely applied in diverse science and engineering domains. MEMS-based microgrippers provide advantages in terms of compact size and low cost, and hence play an important role in microassembly and micromanipulation fields for manipulating micromechanical elements, biological cells, etc. During the past two decades, microactuators based on different actuation principles such as shapememory alloys, electrostatic, electrothermal, piezoelectric, pneumatic and electromagnetic approaches have been devised to drive MEMS microgrippers. Moreover, the integrated position and force sensors can deliver real-time feedback signals to protect both the microgripper and grasped object from damaging. In addition, a number of patents have been devoted to this area. This paper presents a state-of-the-art overview of recent development in the actuators (electrostatic, electrothermal, micro-pneumatic, electromagnetic, shape memory alloy and other actuators) and sensors (optical method, piezoresistive force sensor, capacitive force sensor and other developments). By providing detailed comparisons among them, some guidelines of selection have been underlined for different application scenarios such as biomedical and biological applications, micro-manufacturing and so on.
Keywords: Force feedback, force sensor, MEMS, microactuator, microgripper, micromanipulation
Recent Patents on Mechanical Engineering
Title:MEMS Microgripper Actuators and Sensors: The State-of-the-Art Survey
Volume: 6 Issue: 2
Author(s): Yukun Jia and Qingsong Xu
Affiliation:
Keywords: Force feedback, force sensor, MEMS, microactuator, microgripper, micromanipulation
Abstract: In recent years, microelectromechanical systems (MEMS) have been widely applied in diverse science and engineering domains. MEMS-based microgrippers provide advantages in terms of compact size and low cost, and hence play an important role in microassembly and micromanipulation fields for manipulating micromechanical elements, biological cells, etc. During the past two decades, microactuators based on different actuation principles such as shapememory alloys, electrostatic, electrothermal, piezoelectric, pneumatic and electromagnetic approaches have been devised to drive MEMS microgrippers. Moreover, the integrated position and force sensors can deliver real-time feedback signals to protect both the microgripper and grasped object from damaging. In addition, a number of patents have been devoted to this area. This paper presents a state-of-the-art overview of recent development in the actuators (electrostatic, electrothermal, micro-pneumatic, electromagnetic, shape memory alloy and other actuators) and sensors (optical method, piezoresistive force sensor, capacitive force sensor and other developments). By providing detailed comparisons among them, some guidelines of selection have been underlined for different application scenarios such as biomedical and biological applications, micro-manufacturing and so on.
Export Options
About this article
Cite this article as:
Jia Yukun and Xu Qingsong, MEMS Microgripper Actuators and Sensors: The State-of-the-Art Survey, Recent Patents on Mechanical Engineering 2013; 6 (2) . https://dx.doi.org/10.2174/2212797611306020005
DOI https://dx.doi.org/10.2174/2212797611306020005 |
Print ISSN 2212-7976 |
Publisher Name Bentham Science Publisher |
Online ISSN 1874-477X |
Call for Papers in Thematic Issues
Artificial Intelligence in Advanced Ceramics Reinforced Materials and Coatings for Protection of Turbomachinery
Artificial intelligence (AI) is a very emerging technology in various industrial applications. The expert system enables help in sensing, monitoring, prediction, controlling, and diagnosis the various problems, and provides ease of work. The protection of turbo-machinery and offshore applications against erosion, corrosion, and abrasion is a global concern in the ...read more
Emerging Methods and Techniques in Sustainable Manufacturing and Materials Processing
Sustainability in manufacturing practices to process materials is a globally accepted mandate and it consists of ecofriendly strategies and methods such as processing, synthesis, fabrication, process optimization by experimental, numerical and computational approaches to test, evaluate the performance and reliability of different materials. The success in enhancement of materials processing ...read more
Latest Experimental and Computational Aspects of Advanced Composites for Structural Applications
This proposal highlights the recent developments in the field of advanced composites for structural applications, encompassing both experimental and computational aspects. Furthermore, it focuses on the integration of machine learning and deep learning techniques to enhance the understanding and performance prediction of advanced composite materials. The proposed research aims to ...read more
Opportunities of Emerging Materials Processing for Enhanced Manufacturing in Industry 4.0
This proposed special issue aims to explore the transformative potential of emerging materials processing techniques in the context of Industry 4.0, focusing on the opportunities they present for enhancing manufacturing processes. As Industry 4.0 continues to revolutionize the global manufacturing landscape, the integration of cutting-edge materials processing technologies becomes paramount ...read more
Related Journals
- Author Guidelines
- Graphical Abstracts
- Fabricating and Stating False Information
- Research Misconduct
- Post Publication Discussions and Corrections
- Publishing Ethics and Rectitude
- Increase Visibility of Your Article
- Archiving Policies
- Peer Review Workflow
- Order Your Article Before Print
- Promote Your Article
- Manuscript Transfer Facility
- Editorial Policies
- Allegations from Whistleblowers
Related Articles
-
Cinnamaldehyde-Induced Apoptosis in Human Hepatoma PLC/PRF/5 Cells Involves the Mitochondrial Death Pathway and is Sensitive to Inhibition by Cyclosporin A and z-VAD-fmk
Anti-Cancer Agents in Medicinal Chemistry A Review of Probiotic Supplementation and Feasibility of Topical Application for the Treatment of Pediatric Atopic Dermatitis
Current Pharmaceutical Biotechnology Long-Chain Omega-3 Fatty Acid Deficiency in Mood Disorders: Rationale for Treatment and Prevention
Current Drug Discovery Technologies Recent Advances in Nanosystems and Strategies for Managing Leishmaniasis
Current Drug Targets Polyphenols’ Effect on Cerebrovascular Health
Current Medicinal Chemistry Evolving Concepts Concerning Cardiac β-Adrenoceptor Function in Heart Failure
Current Pharmaceutical Design Regulation of Neurotrophic Factors and Energy Metabolism by Antidepressants in Astrocytes
Current Drug Targets A Systematic Approach to Assess the Burden of Drug Interactions in Adult Kidney Transplant Patients
Current Drug Safety Immunosuppression in Liver Transplantation
Current Drug Targets Editorial [Hot topic: Current Status of Drug Eluting Stents (Executive Editor: Nicholas Kipshidze)]
Current Pharmaceutical Design What Restricts the Clinical Use of Nicotinic Acid?
Current Vascular Pharmacology Prediction Models and Scores in Pulmonary Hypertension: A Review
Current Pharmaceutical Design The Role of Thrombomodulin in Atherosclerosis: From Bench to Bedside
Cardiovascular & Hematological Agents in Medicinal Chemistry Biotechnological Synthesis and Transformation of Valuable Sugars in the Food and Pharmaceutical Industry
Current Organic Chemistry Safety of Canagliflozin in Patients with Type 2 Diabetes
Current Drug Safety Fibroblast Growth Factors, Fibroblast Growth Factor Receptors, Diseases, and Drugs
Recent Patents on Cardiovascular Drug Discovery An Overview of Piperazine Scaffold as Promising Nucleus for Different Therapeutic Targets
Current Pharmaceutical Design Mapping of the Active Site of Proteases in the 1960s and Rational Design of Inhibitors/Drugs in the 1990s
Current Protein & Peptide Science Curcumin Efficacy in a Serum/Glucose Deprivation-Induced Neuronal PC12 Injury Model
Current Molecular Pharmacology Assessment of Endothelial Function by Positron Emission Tomography
Current Cardiology Reviews