Abstract
In this study the anodization performance of probe nanolithography on titanium is investigated with a noncontact atomic force microscope (AFM) with both conductive and carbon nanotube (CNT) probes. The topographies and heights of nanodots and nanolines produced at different voltages, hold times, pulse durations, and writing speeds are studied. The results show that under stationary anodization, the CNT probe is generally better than the conductive probe in terms of its efficiency with regard to voltages, hold time and pulse duration. However, under mobile anodization of nanolines, the CNT probe is worse due to bending.
Keywords: Atomic force microscopy, carbon nanotube (CNT), local electrochemical nanolithography, growth mechanism, nanostructure
Current Nanoscience
Title: Anodization Capabilities of Scanning Probe Lithography with Conductive and Carbon Nanotube Probes
Volume: 4 Issue: 4
Author(s): Te-Hua Fang, Tong Hong Wang and Kuan-Te Wu
Affiliation:
Keywords: Atomic force microscopy, carbon nanotube (CNT), local electrochemical nanolithography, growth mechanism, nanostructure
Abstract: In this study the anodization performance of probe nanolithography on titanium is investigated with a noncontact atomic force microscope (AFM) with both conductive and carbon nanotube (CNT) probes. The topographies and heights of nanodots and nanolines produced at different voltages, hold times, pulse durations, and writing speeds are studied. The results show that under stationary anodization, the CNT probe is generally better than the conductive probe in terms of its efficiency with regard to voltages, hold time and pulse duration. However, under mobile anodization of nanolines, the CNT probe is worse due to bending.
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Cite this article as:
Fang Te-Hua, Wang Hong Tong and Wu Kuan-Te, Anodization Capabilities of Scanning Probe Lithography with Conductive and Carbon Nanotube Probes, Current Nanoscience 2008; 4 (4) . https://dx.doi.org/10.2174/157341308786306143
DOI https://dx.doi.org/10.2174/157341308786306143 |
Print ISSN 1573-4137 |
Publisher Name Bentham Science Publisher |
Online ISSN 1875-6786 |
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