Semiconductor Strain Metrology: Principles and Applications

Indexed in: Scopus, EBSCO.

This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers ...
[view complete introduction]



Pp. 132-136 (5)

DOI: 10.2174/978160805359911201010132

Author(s): Terence K.S. Wong