Semiconductor Strain Metrology: Principles and Applications

Indexed in: Scopus, EBSCO.

This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers ...
[view complete introduction]

US $

*(Excluding Mailing and Handling)

Appendix 1

Pp. 129-131 (3)

Terence K.S. Wong


Division of Microelectronics School of Electrical and Electronic Engineering Nanyang Technological University