Semiconductor Strain Metrology: Principles and Applications

Indexed in: Scopus, EBSCO.

This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers ...
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Appendix 1

Pp. 129-131 (3)

DOI: 10.2174/978160805359911201010129

Author(s): Terence K.S. Wong