Background: The MEMS scanning mirror prototype is a spatial scanning device, which
has advantages such as light mass, low drive voltage, large scanning and high angular measurement
Methods: The MEMS scanning mirror prototype uses the piezoelectric driving principle to drive the
micro-structure to realize two-axis scanning. The corner of the MEMS scanning mirror is measured
by using a piezoelectric resistance sensor. In the paper, the damping properties of MEMS scanning
mirrors have been studied, which deduce the damping force formula of MEMS scanning mirrors.
Moreover, the influence of different sizes and structures of MEMS scanning mirrors on the damping
force and the amplitude of scanning mirror angles are analyzed, and a structural optimization design
method to reduce the driving voltage of MEMS scanning mirrors is proposed.
Results: The theoretical analysis, design and testing of piezoelectric driven MEMS scanning microscopes
have been carried out.
Conclusion: Through related experiments, it is verified that the maximum scanning range and the
precision index of angle measurement meet the requirements of the index.