Multi-objective Design Optimization of Microdisk Resonator

Author(s): M. Sutagundar*, B.G. Sheeparamatti, D.S. Jangamshetti

Journal Name: Nanoscience & Nanotechnology-Asia

Volume 10 , Issue 4 , 2020

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Graphical Abstract:


Objective: This paper presents a multi-objective design optimization of MEMS disk resonator using two techniques.

Methods: Determining the optimized dimensions of disk resonator for a particular resonance frequency so as to achieve higher quality factor and lower motional resistance is attempted. One technique used is constraint-based multi-objective optimization using the interior-point algorithm. The second technique is based on multi-objective genetic algorithm.

Results: The algorithms are implemented using MATLAB. The two techniques of optimization are compared.

Conclusion: The developed optimization methods can provide faster design optimization compared to full-wave simulators resulting in significant reduction of design time.

Keywords: MEMS disk resonator, design optimization, multi-objective optimization, interior point method, constrained optimization, genetic algorithm, resonance frequency, quality factor, motional resistance.

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Article Details

Year: 2020
Published on: 25 August, 2020
Page: [478 - 485]
Pages: 8
DOI: 10.2174/2210681209666190912152649
Price: $25

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