Design of Piezoresistive based Microbridge for MEMS Pressure Sensor

(E-pub Ahead of Print)

Author(s): K. Girija Sravani*, G. Sai Lakshmi, K. Srinivasa Rao

Journal Name: Micro and Nanosystems

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Abstract:

In this paper, we have designed and simulated three types of microbridges using COMSOL MultiphysicsFEM tool, the mechanical behavior of three microbridges and its response is analyzed based on the non-linearity and sensitivity parameters. Finally, the proposed microbridge is integrated with an electro-osmotic pressure sensor to measure the variation in glucose concentration levels.

Keywords: Diabetes, piezoresistive, piezoelectric, capacitive principle, microbridge, electroosmosis, MEMS.

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(E-pub Ahead of Print)
DOI: 10.2174/1876402911666190613110809

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