RF MEMS switch is one of new microwave devices with MEMS technology. Development directions of RF
switch are high-power and high-reliability. It has many advantages, such as low loss, low power, excellent linearity, small
size and easy integration. Its research status and performances are introduced in this paper. Relevant researches and patents
are studied. Some measures to improve power and reliability are proposed. The application areas and major problems
are analyzed. The development trends are presented.
Keywords: High-power, high-reliability, MEMS, microwave, RF, technology.
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