Ion Implantation and Activation

Volume: 2

Indexed in: EBSCO.

Ion Implantation and Activation presents the derivation process of related models in a comprehensive step by step manner starting from the fundamental processes and moving up into the more advanced ...
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Pp. 163-165 (3)

DOI: 10.2174/9781608057900113020012

Author(s): Kunihiro Suzuki