Parameter Extraction for Analytical Ion Implantation Profile Model
Pp. 241-265 (25)
Experimental data and Monte Carlo data provide data sources for
constructing ion implantation profile database. We need to extract parameters for
various analytical functions from the profile data. We showed that, for the expression of
ion implantation profiles, there are many local minimum values sets for the third and
fourth moment parameters of γ and β for the Pearson function that comprises the
standard dual Pearson and tail functions. It was proposed to use a joined tail function as
a mediate function to extract γ and β , and demonstrated that this enables us to
extract the parameters uniquely. Other parameters associated with channeling
phenomena can also be simply and uniquely extracted by the procedure.
Ion implantation, Pearson function, dual Pearson, tail function,
database, Gauss, joined half Gauss, SIMS, electron stopping power, Monte Carlo,
low energy, shallow junctions, parameter extraction, B, As, joined tail function,
mediate function, channeling.
Fujitsu limited Minatoku kaigan 1-11-1 Tokyo Japan.