The Other Analytical Model for Ion Implantation Profiles: Edgeworth Polynomial
Pp. 223-240 (18)
Pearson function is commonly used to express ion implantation profiles
based on its four moments. Pearson function is not the unique one that uses the given
four moments. Edgeworth polynomial is a function that is also generated using the four
moments or more. We explain the model in this section, and express some experimental
data with this model.
Ion implantation, Edgeworth polynomial, Hermete polynomial,
kurtosis, moment, characteristic function, exponential function, Hermete
polynomial, Gaussian function, central limit theorem, cumulants, standard
deviation, SIMS, Sb, Pearson function.
Fujitsu limited Minatoku kaigan 1-11-1 Tokyo Japan.