Ion Implantation and Activation

Ion Implantation and Activation

Volume: 1

Indexed in: EBSCO.

Ion Implantation and Activation presents the derivation process of related models in a comprehensive step by step manner starting from the fundamental processes and moving up into the more advanced ...
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Pearson Function Family

Pp. 168-222 (55)

Kunihiro Suzuki


Pearson IV is one function among Pearson function family, where various Pearson functions exist. Each Pearson function is characterized by its related γ2 β plane. The moments of real profiles frequently deviate from the plane for the Pearson IV function. Therefore, we need to extend the function to whole Pearson function family. We described the detail derivation of the functions.


Ion implantation, Pearson, Pearson function family, Pearson I, Pearson II, Pearson III, Pearson IV, Pearson V, Pearson VI, Pearson VII, skeweness, kurtosis, moment, projected rage.


Fujitsu limited Minatoku kaigan 1-11-1 Tokyo Japan.