Abstract
In recent years, large numbers of patents have been devoted to developing the nano-imprint lithography (NIL) process techniques for significant improvement in both nano-fabrication precision and feature size of the template pattern. Nano-imprint lithography is one of the most promising patterning technologies, in which nano- and micro-patterns are fabricated on various substrates. Nano-imprint pattern transfer is to let the resist flow and then fill in the cavity structure of the feature pattern on the surface of the mold by the compression of the mold; after completing the filling, make the resist continue thinning under the pressure to the extent permitted by the follow-up processes; then stop the compression and cure the resist. Adopting the traditional pattern replicating technology with the advantages of high throughput, low cost and simple process, nano-imprint lithography has become an important fabrication technology for nano-scale electronic devices. Based on the description of the constituent elements of the nano-imprint lithography, this paper makes a brief introduction of several traditional imprint technology processes and their varieties which were hot embossing lithography, ultra violet nano-imprint lithography, micro-contact printing and summarizes the key technique issues involved in the nano-imprint lithography, and analyzes the challenges faced in the application of this process in fabricating the integrated circuit.
Keywords: Electron beam direct writing, hot embossing lithography, integrated circuit, micro-contact printing, nano-imprint lithography (NIL), replicating technology, ultra violet nano-imprint lithography
Call for Papers in Thematic Issues
Artificial Intelligence in Advanced Ceramics Reinforced Materials and Coatings for Protection of Turbomachinery
Artificial intelligence (AI) is a very emerging technology in various industrial applications. The expert system enables help in sensing, monitoring, prediction, controlling, and diagnosis the various problems, and provides ease of work. The protection of turbo-machinery and offshore applications against erosion, corrosion, and abrasion is a global concern in the ...read more
Emerging Methods and Techniques in Sustainable Manufacturing and Materials Processing
Sustainability in manufacturing practices to process materials is a globally accepted mandate and it consists of ecofriendly strategies and methods such as processing, synthesis, fabrication, process optimization by experimental, numerical and computational approaches to test, evaluate the performance and reliability of different materials. The success in enhancement of materials processing ...read more
Latest Experimental and Computational Aspects of Advanced Composites for Structural Applications
This proposal highlights the recent developments in the field of advanced composites for structural applications, encompassing both experimental and computational aspects. Furthermore, it focuses on the integration of machine learning and deep learning techniques to enhance the understanding and performance prediction of advanced composite materials. The proposed research aims to ...read more
Opportunities of Emerging Materials Processing for Enhanced Manufacturing in Industry 4.0
This proposed special issue aims to explore the transformative potential of emerging materials processing techniques in the context of Industry 4.0, focusing on the opportunities they present for enhancing manufacturing processes. As Industry 4.0 continues to revolutionize the global manufacturing landscape, the integration of cutting-edge materials processing technologies becomes paramount ...read more
Related Journals
Related Books
Intelligent Technologies for Automated Electronic Systems
Modern Radio Signals Filtering Devices Methods, Technologies, & Structures
Functional Bio-based Materials for Regenerative Medicine: From Bench to Bedside (Part 2)
Mechanical Engineering Technologies and Applications
Multistage Interconnection Network Design for Engineers
Mechanical Engineering Technologies and Applications
Semi-rotary and Linear Actuators for Compressed Air Energy Storage and Energy Efficient Pneumatic Applications
Waste Valorization for Value-added Products
One-Dimensional Transient Flow in Pipelines Modelling and Simulation
Principles of Automation and Control
15