Getter Films for Small Vacuum Chambers

Author(s): Konstantin A. Chuntonov, Sergey P. Yatsenko

Journal Name: Recent Patents on Materials Science
Continued as Current Materials Science

Volume 6 , Issue 1 , 2013


This patent review analyzes the state of the developments related to getter films intended for vacuum opto- and microelectronics. With current production technology, high hermiticity of the packages and high sorption efficiency of the getter films cannot be achieved simultaneously. A new classification of getter films is suggested in this paper, prompting a new approach to the problems associated with vacuum for small sealed-off chambers. An acceptable price-reliability ratio of vacuum devices can be obtained by combining low temperature (not higher than 150°C) sealing methods with reactive getter films that have high sorption capacity.

Keywords: Classification of getters, getter reactive films, low temperature sealing, MEMS, microelectronic packages, vacuum, Getter Films, Film Structure, Vacuum Device, Barium Micro-Dispenser

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Article Details

Year: 2013
Published on: 11 November, 2012
Page: [29 - 39]
Pages: 11
DOI: 10.2174/1874464811306010029

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