Search Result "reactive ion etching (RIE)."


Integration and Optimisation of PZT Piezoelectric Thin Films in Micro and Nano Dimensional Structures

Journal: Micro and Nanosystems
Volume: 1 Issue: 3 Year: 2009 Page: 214-225
Author(s): D. Remiens, C. Soyer, D. Troadec, D. Deresmes, D. Jenkins, R. liang, G. Wang, X. Dong, A. Da Costa, R. Desfeux

Nanodevices Based on Silicon Nanowires

Journal: Recent Patents on Nanotechnology
Volume: 3 Issue: 1 Year: 2009 Page: 1-9
Author(s): Yuting Wan, Jian Sha, Bo Chen, Yanjun Fang, Zongli Wang, Yewu Wang

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