Background: ZnO nanorod arrays (ZnO-NRA) are promising materials for the current
research. The hydrothermal synthesis is considered as the most promising method for ZnO growth.
ZnO-NRA-based UV sensors have been focused upon because of their use in the various fields. In
this work, we fabricated zinc oxide (ZnO) nanorod array (NRA)-based metal–semiconductor–metal
(MSM) UV sensors on glass substrates.
Methods: The ZnO-NRA was grown above ZnO-seed layer/glass using a low-temperature hydrothermal
method. The MSM structure-based sensor was fabricated by depositing interdigitated contacts
of Ag on NRA/glass samples. The crystalline structure and surface morphology of NRA were
examined by X-ray diffraction and scanning electron microscopy. The values of responsivity and
photocurrent to dark current ratio were obtained from the I-V characteristics of the MSM UV sensors.
Results: The grown single-crystalline ZnO nanorods were highly dense and uniform. The contrast
ratio (C.R.) was found to be 9.20 at 1.50 V. The responsivity of UV sensors was found to be 0.122
mA/W at λ=365 nm.
Conclusion: ZnO nanorods were grown on glass substrates using a low-temperature hydrothermal
method and the I-V characteristics of Ag/ZnO-NRA/Ag based MSM UV sensors were tested under
UV light. The MSM UV sensors exhibited a photo current to dark current ratio of ~ 9.20 at 1.50 V,
and a responsivity of 0.122 mA/W at 365 nm. These results can provide a deep insight into fabricating
simpler, efficient, and inexpensive UV sensors for practical applications.