Zinc Oxide (ZnO) nanowires were produced by using the seed layer deposition, RF cylindrical magnetron sputtering and sol-gel spin coating techniques. The ZnO seed layer films were characterized by atomic force microscopy (AFM) and ellipsometry. The ZnO nanowires were characterized by scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS), transmission electron microscopy (TEM) and X-ray diffraction (XRD). Deposition of ZnO seed layer films using the RF cylindrical magnetron sputtering technique produced the best aligned c-axis orientated nanowires with uniform dimensions. An increase in the gold (Au) film layer thickness produced nanowires of smaller diameter and less orientation in the c-axis. Polycrystalline Au film layer increased the mean diameter of the ZnO nanowires without effecting the c-axis orientation. This study provided valuable information in controlling the dimensions and alignment of ZnO nanowires.