Semiconductor Strain Metrology: Principles and Applications

Indexed in: Scopus, EBSCO.

This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers ...
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Pp. 132-136 (5)

Terence K.S. Wong

Affiliation:

Division of Microelectronics School of Electrical and Electronic Engineering Nanyang Technological University