Atomic Force Microscopy Digital Image Correlation Method
Pp. 102-111 (10)
Terence K.S. Wong
An in situ method of strain characterization based on image analysis of atomic force
microscope images is presented. The sample topographic image is measured before and after
deformation using an atomic force microscope with closed loop feedback control of position. By using
a mapping function for each point in the image and performing a correlation using the height data, the
displacement, strain and strain gradient can be deduced. The digital image correlation algorithm is most
suitable for microelectromechanical materials and devices.
X-rays, Synchrotron, Beamline, Microdiffraction, Bragg law, Reciprocal space, Electromigration.
Division of Microelectronics School of Electrical and Electronic Engineering Nanyang Technological University