Semiconductor Strain Metrology: Principles and Applications

Indexed in: Scopus, EBSCO.

This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers ...
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Strain, Stress and Semiconductor Properties

Pp. 15-26 (12)

Terence K.S. Wong


This tutorial chapter provides a synopsis of the theoretical concepts needed for understanding subsequent chapters. The concepts of engineering strain, true strain, Eulerian strain and in particular, the tensor nature of strain are first introduced. The components of the stress tensor which give rise to strain are next discussed. The three main elastic properties of solids namely: Young’s modulus, shear modulus and Poisson’s ratio are defined. The piezoresistance effect introduced in the first chapter is discussed quantitatively. This is followed by two topics on the optical properties of semiconductors, the Kramers-Kronig relation and the optical joint density of states used in optical strain metrology.


Strain, Stress, Tensor, Piezoresistivity, Dielectric function, Critical points.


Division of Microelectronics School of Electrical and Electronic Engineering Nanyang Technological University