Semiconductor Strain Metrology: Principles and Applications

Author(s): Terence K.S. Wong

Indexed in: Scopus

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This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers ...
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Foreword  promotion: free to download

Pp. i

Rakesh Kumar



Preface  promotion: free to download

Pp. ii

Terence K.S. Wong



PART 1: INTRODUCTION

Pp. 3

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Introduction to Strain Metrology for Semiconductors

Pp. 4-14 (11)

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Strain, Stress and Semiconductor Properties

Pp. 15-26 (12)

Terence K.S. Wong


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PART 2: OPTICAL STRAIN METROLOGY

Pp. 27

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Variable Angle Spectroscopic Ellipsometry

Pp. 28-37 (10)

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Photoreflectance Method

Pp. 38-49 (12)

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Micro-Raman Spectroscopy

Pp. 50-58 (9)

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PART 3: ELECTRON BEAM STRAIN METROLOGY

Pp. 59

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Cathodoluminescence Method

Pp. 60-69 (10)

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Dark-Field Electron Holographic Moire Method

Pp. 80-89 (10)

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PART 4: EMERGING STRAIN METROLOGY

Pp. 90

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Tip-Enhanced Raman Spectroscopy

Pp. 91-101 (11)

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Atomic Force Microscopy Digital Image Correlation Method

Pp. 102-111 (10)

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Synchrotron X-ray Micro/Nanodiffraction Methods

Pp. 112-125 (14)

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Conclusion and Outlook

Pp. 126-128 (3)

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Appendix 1

Pp. 129-131 (3)

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Index  promotion: free to download

Pp. 132-136 (5)

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