Scaling down in “nano” direction changes the face of mechanics: ultimately, the electro-mechanical devices and systems become competitive or synergistic with electronics, but some extraordinary barriers for the further progress are revealing as well. This article presents an analytical overview of some recent patents and patent applications in the field of Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS). Review is especially focused on challenging, even problematic works and includes the relevant patent publications up-to-date. The reviewed topics are: mechanical resonant frequency in proximity of the GHz-range; towards nanomechanical mass detection in the single Dalton range; synergy of nanomechanics and coherent optics, including implementation in gravity sensors and optical tweezers; nanomechanical-nanoparticles thruster for spacecrafts; memory devices: from continuous movement of the entire storage system to nano-scale movements in selected cells; nanomechanical devices based on quantum phenomena; surface, friction and stiction control in nanomechanical devices; stress- controllable and controlling; in search of nano-construction materials.
Keywords: Micro-electro-mechanical systems OR MEMS, nano-electro-mechanical systems OR NEMS, nanomechanics, scanning probe microscopy, quantum size effects, optical tweezers, nanodevice or nano-device, microfluidic or micro-fluidic, nanofluidic or nano-fluidic, MEMS, NEMS, Casimir force, Scanning Tunnelling Microscope, USPTO, transmission mode, TEM, Mechanical Resonant Frequency, GHz-range, ultrahigh frequency, Gravimeters, electrical spinning, Field Emission Electric Propulsion, FEEP, ultra-nanocrystalline diamond, VLS mechanism, Epitaxy, paradox, “impressive mechanical stress uniformities”, Nanocomposite films, diamond-like carbon, DLC, connection tyranny, Atomic Game Microscopy?, Nano-manipulator, Nano-spool, Amazonia
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