A Review of Recent Patents on Bulk Acoustic Wave Resonators and Filters
Oscar Menendez, Jordi Verdu, Eden Corrales and Pedro de Paco
Affiliation: Department of Telecommunications and Systems Engineering, Universitat Autonoma de Barcelona (UAB), Q-building, Campus of UAB, 08193 Bellaterra (Cerdanyola del Valles), Barcelona, Spain.
Keywords: Bulk acoustic wave technology, electrically-connected resonator filters, acoustically-coupled resonator filters
In this article, recent patents on bulk acoustic wave (BAW) resonators and filters are reviewed. This technology is suggested as a viable alternative to conventional surface acoustic wave (SAW) technology since it offers better performance. As regards resonators, in this review article recent patents on the design and fabrication of Film Bulk Acoustic Resonators (FBARs) and Solidly Mounted Resonators (SMRs) are presented. The reviewed patents on BAW filters are divided into two categories. In the first one, patents which deal with electrically-connected resonator filters are presented, whereas in the second one, acoustically-coupled resonator filters are addressed. Finally, current and future developments of this technology are given.
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