Abstract
Chemo-mechanical polishing (CMP) has been a common method to produce nano-scale surface finish of brittle wafers. This paper provides a relatively comprehensive review on the CMP of silicon, silicon carbide and sapphire including both patents and papers. The discussion includes the limitations and further research directions of the CMP technology, the material removal mechanisms, and the control and optimization of the CMP for brittle wafers. The paper concluded that the usage of mix- or coated- abrasives may improve the CMP in terms of less subsurface damage and higher material removal rate.
Keywords: Brittle wafer, CMP, Silicon, Silicon carbide, sapphire
Recent Patents on Nanotechnology
Title: On the Chemo-Mechanical Polishing for Nano-Scale Surface Finish of Brittle Wafers
Volume: 4 Issue: 2
Author(s): Y.G. Wang and L. C. Zhang
Affiliation:
Keywords: Brittle wafer, CMP, Silicon, Silicon carbide, sapphire
Abstract: Chemo-mechanical polishing (CMP) has been a common method to produce nano-scale surface finish of brittle wafers. This paper provides a relatively comprehensive review on the CMP of silicon, silicon carbide and sapphire including both patents and papers. The discussion includes the limitations and further research directions of the CMP technology, the material removal mechanisms, and the control and optimization of the CMP for brittle wafers. The paper concluded that the usage of mix- or coated- abrasives may improve the CMP in terms of less subsurface damage and higher material removal rate.
Export Options
About this article
Cite this article as:
Wang Y.G. and Zhang L. C., On the Chemo-Mechanical Polishing for Nano-Scale Surface Finish of Brittle Wafers, Recent Patents on Nanotechnology 2010; 4 (2) . https://dx.doi.org/10.2174/187221010791208812
DOI https://dx.doi.org/10.2174/187221010791208812 |
Print ISSN 1872-2105 |
Publisher Name Bentham Science Publisher |
Online ISSN 2212-4020 |
Call for Papers in Thematic Issues
Advances in Vanadium and Titanium Resources for High-performance Materials via Nanostructuring and Nanoengineering (updated BMS-NANOTEC-2023-HT-31)
Vanadium and titanium-based materials are ideal candidates for structural and functional materials in aerospace, biomedical engineering, optics, catalysis, energy storage and conversion etc. Vanadium/titanium-based alloys, compounds and materials have a large family with different chemical compositions, dimensions, structures/morphologies, and chemical/physical/mechanical properties, which provides huge opportunities for the development of emerging ...read more
Green Nanotechnology and Nanomaterials for a Sustainable Environment
Green nanotechnology (GN) might wind up being the most efficient platform for achieving the goals of the 2030 Agenda. The goal of GN is to create goods and procedures that are secure, energy-efficient, waste-free, and emit fewer greenhouse gases. Such goods and procedures use renewable resources, and/or their environmental impact ...read more
Nano-coatings and Nanoscale Composites for Hazardous Environments
Automobile, defence, and aerospace sectors need lightweight material for fuel efficiency and lower emissions. Often these materials are added with nanoscale reinforcements or have to be coated with nanomaterials to improve the scratch resistance, self-healing behaviour and corrosion and wear resistance and are all much needed for hazardous environments without ...read more
NANOSTRUCTURED NEUROMORPHIC DEVICES: TOWARDS IN MATERIA COMPUTING
The efforts pursued in the last decade to build up brain-inspired systems with electronic hardware solutions to solve complex data processing tasks, have leaded to the development of a new generation of devices, as memristor crossbar arrays, and their different applications became more and more reliable. One of the basic ...read more
Related Journals
- Author Guidelines
- Graphical Abstracts
- Fabricating and Stating False Information
- Research Misconduct
- Post Publication Discussions and Corrections
- Publishing Ethics and Rectitude
- Increase Visibility of Your Article
- Archiving Policies
- Peer Review Workflow
- Order Your Article Before Print
- Promote Your Article
- Manuscript Transfer Facility
- Editorial Policies
- Allegations from Whistleblowers