The aim of this article is to provide a systematic method to perform experimental test and theoretical evaluation on adhesion properties of the Cr/Al interface structure. A specified Cr/Al interface film assembly was deposited on the quartz glass by using RF magnetron sputtering. The elastic modulus and the hardness of the sample are tested by the nanoindentation tester. The test results show that the elastic modulus and the hardness of the sample have a nonlinear characteristic with different depth h of the interface structure. In the meantime, a finite element model is built to simulate the interface characteristics of the sample. The analysis shows that the stress mainly centralizes close to the top of the nanoindentation tester and the maximum stress occurs in the second layer Al film, not the first layer Cr film. The comparison between the test and the simulation shows the validity of the experimental test and the modeling method of each other. It builds a basis for future work such as fabrication of Cr/Al interface structure for micro/nano manufacturing.
Keywords: The Cr/Al interface structure, experimental test, modeling, finite element method, Adhesion Properties, finite element model, hardness
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