Recent Patents on Measurement of Parallelism of Plates

Author(s): Baocheng Xie* , Xiaowei Ni , Jingang Jiang .

Journal Name: Recent Patents on Mechanical Engineering

Volume 12 , Issue 2 , 2019

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Background: Parallel plate structures are widely used in micro-electromechanical systems, and the measuring technology of parallelism of parallel plates becomes more and more inevitable. More and more attention has been paid on the development of measuring technology of parallelism of parallel plates.

Objective: To meet the increasing requirement of measuring precision and measuring efficiency of parallelism measurement of parallel plates, the measuring devices and measuring methods of the parallelism measurement are constantly being enhanced.

Methods: This paper retraces varieties of representative patents relevant to the measuring devices and measuring methods of the parallelism measurement of parallel plates.

Results: Through retracing the characteristics of different types of measuring devices and measuring methods of parallelism measurement of parallel plates, the main problems existing in the current development such as low measuring precision and low measuring efficiency are concluded and analyzed. Development of patents on the measuring devices and measuring methods of the parallelism measurement is discussed in the future.

Conclusion: The optimization and development of parallelism measurement are beneficial to improve measuring precision and measuring efficiency of parallelism measurement of parallel plates. More related patents on parallelism measurement of parallel plates will be invented.

Keywords: Measuring devices, measuring efficiency, measuring method, measuring precision, parallelism, parallel plates.

Leus V, Elata D. On the dynamic response of electrostatic MEMS switches. J Microelectromech Syst 2008; 17(1): 236-43.
Hsu YW, Lin YC. Modeling and characterization of slitted parallel-plate waveguide with applications for slit-based planar structures. IEEE Trans Microw Theory Tech 2017; 65(7): 1-12.
Zhao PC, Zong ZY, Wu W, Li B, Fang DG. An FSS structure with geometrically separable meander-line inductors and parallel-plate capacitors. IEEE Trans Antenn Propag 2017; 65(9): 4693-705.
Jang KW, Yang SP, Baek SH, Lee MS, Park HC. Electrothermal MEMS parallel plate rotation for single-imager stereoscopic endoscopes. Opt Express 2016; 24(9): 9667-72.
Gbehe OST, Khlifi ME, Nabhani M, Bou-Saïd B. Numerical modeling of poro-elasticity effects on squeeze film of parallel plates using the homogenization method. Tribol Int 2016; 102: 70-8.
Cao LB. Rapid measurement of parallelism of planar crystals by digital wavefront interferometer. Ind Meas 2011; 21(1): 9-10.
Zhao LL, Wang ZJ, Wei HK. Research on measurement accuracy of parallelism and verticality of roller system. Ind Control Comput 2017; 30(6): 76-7.
Ning HJ. Development of parallelism error measuring instrument for inner ring end face of car hub bearing MS Dissertation, Dalian University of Technology, Dalian, China 2015.
Li C. Research on measurement method and evaluation strategy of double-sided parallelism MS Dissertation, Harbin Institute of Technology, Harbin, China 2015.
Chen P, Lu YM, Bi CX. Error analysis of face-to-face sound intensity probe understanding wave sound field. Acta Metrol Sin 2013; 34(2): 149-54.
Nawazuddin MBS, Wiegerink RJ, Lammerink TSJ, Elwenspoek MC. Parallel plate structures for optical modulation and casimir force measurement. 20th Micromechanics Europe Workshop, MME. Toulouse, France September. 2009.
Lan B, Feng GY, Tao Z, Liang J, Zhou SH. A single-element interferometer for measuring parallelism and uniformity of transparent plate. Acta Phys Sin 2017; 66(6): 351-60.
Wu T, Gao G, Liu S, Wei Z, Zhang G. A method for compensating the z motion parallelism error of CMM. J Tianjin Univ 2017; 50(5): 536-9.
Zhang LZ, Hu JP, Wan DM, Zeng X, Li CM, Zhou X. Innovative measurement of parallelism for parallel transparent plate based on optical scanning holography by using a random-phase pupil. Appl Opt 2015; 54(9): 2483-8.
Men YQ, Yang XZ. Flatness and parallelism control of wind power tower flange. Mech Res Appl 2016; 29(4): 193-5.
An SH. Parallelism stabilization structure of dual-shaft hinge US20150245511 2015.
Schmidt-Lange MP, Wasserman MB, Braun CW. Systems and methods for determining and adjusting a level of parallelism related to the bonding of semiconductor elements US9425163 2016.
Peng Y, Wang J, Hua H, Chen H, Deng R. Design method of the mosaic collimator for improving beam parallelism CN106932896 2017.
Kim JC, Kang GM, Cho KB, Ha YD. Apparatus for correcting parallelism between a bonding head and a stage, and a chip bonder including the same US20180102340 2018.
Tian H, Ma Y. Attribute-based encryption outsourcing method with high parallelism CN105978685 2016.
Zhao Y. Parallelism detection device and detection method CN103453854 2016.
Murty MVRK, Shukla RP. Method for measurement of parallelism of optically parallel plates. Opt Eng 1979; 18(3): 352-3.
Jiang LX, Shang JF, Li QL. A method for measuring the parallelism of cadmium telluride crystal by optical comparing angle measuring instrument. J Synth Cryst 2017; 7: 220-3.
Zhou JL, Lin ZX. Data processing of face-to-face parallelism error. Tool Eng 2010; 44(6): 91-3.
Chen YL, Shimizu Y, Tamada J, Kudo Y, Madokoro S, Nakamura K, et al. Optical frequency domain angle measurement in a femtosecond laser autocollimator. Opt Express 2017; 25(14): 16725-38.
Zhang LZ, Hu JP, Wan DM, Zeng X, Li CM, Zhou X. Innovative measurement of parallelism for parallel transparent plate based on optical scanning holography by using a random-phase pupil. Appl Opt 2015; 54(9): 2483-8.
Zhao Y, Zhang B, Feng Q. Measurement system and model for simultaneously measuring 6DOF geometric errors. Opt Express 2017; 25(18): 20993.
Hu M. Research on parallelism detection and dressing technology of precision components MS Dissertation, Dalian University of Technology, Dalian, China, 2012.
Ke J, Liang X. Rapid detection design of non-parallelism of flat glass based on MATLAB electronic measurement technology. Electron Meas Technol 2011; 12: 92-6.
Morita H, Ogiso T. The method of parallel measurement of the injection molding machine, a parallel measurement device of the injection molding machine and injection molding machine CN104842533 2017.
Fu X. Parallelism measuring device CN202661024 2013.
Yan L. An inspection device for parallelism CN207036027 2018.
Guo K, Chen HN, Ni MY, Sui YX, Yang HJ. A method of measuring plane parallelism CN108020194 2018.
Liang ST, Ren N, Wu YH, Sun YX, Fan HY. A method for detecting the parallelism of the head CN106679547 2017.
Chen C. A measuring tool for measuring the parallelism of two surfaces of a workpiece CN206235288 2016.
Li Z. A measuring device for adjusting the parallelism of the grinding wheel of the grinding machine CN206593581 2017.
Zhan H. A special measuring fixture for measuring parallelism CN206959767 2018.
Yin E, Li C, Xu J, Wang L, Jiang C. A kind of parallelism measuring device CN207317714 2018.
Cai X, Xu X, Lan F, Fang C. A tool for measuring the parallelism of the wheel workpiece CN207317719 2018.
Jywe WY, Wu CH, Teng YF. Optical parallelism measurement device US8477321 2013.
Zhou TY, Wang XB, Tang H. A device for measuring plane parallelism CN103499312 2014.
Yu W, Wang E, Wang C, Sun Q. test device for high accuracy parallelism of the plane CN102538714 2012.
Jia S, Guo K, Song X, Jiang T, Mei X. The invention relates to a rapid measuring device and a measuring method for the planar parallelism of the guide rail of a machine tool CN105698670 2016.
Wang B, Yue X, Jiang J, Yuan D. A parallelism measuring device for two back body lines CN103954211 2016.
Li F, Guo X, Wu Q, Xu H. An intelligent measuring device for thickness and parallelism CN103234488 2016.
Wu J, Liu Q, Han W. Parallel detection method of dynamic shear rheometer based on image processing CN104724932 2015.
Davi OM. Apparatus and method for the electrohydraulic control of parallelism in a bending machine for working metal products US20170025335 2017.
Hu Y, Wang X, Li Z, et al. Ship lift guide rail parallelism measurement method CN106247995 2016.
Chen J, Jiang R, Wang H, Xue L, Du B. Parallelism of the laser emitting device for detecting the visual axis and the optical axis CN106679594 2017.
Liang Z. A digital measuring device for the parallelism of the guide rail CN205825915 2016.
Cai L, Jiang X, Liu Z, Cheng Q, Qin D. A fast measurement method for the parallelism error of linear guide rail CN104807417 2015.
Zeng Q, Tong Q. A new parallel detection method and its device CN105091793 2015.
Chen Z, Peng S, Yang H, et al. Wafer parallelism test methods CN105910530 2016.
Kong X, Li A, Deng Y. A planar parallelism measuring device and measuring method CN107677219 2018.
Miao S. A measuring device for colorimetric wheel parallelism CN205482835 2016.
Mei Y, Lin J, Wen Z. Parallel adjustment device and DVD growth film device CN104900473 2017.
Lin M. Parallel adjustment device for the push paper CN201338307 2009.
Huang M, Du S, Lin K. Two-dimensional parallel adjusting device CN101562053 2009.
Noguchi T. Parallelism adjustment mechanism and the inspection apparatus of a probe card JP5826466 2015.
Dunham G, Pack T, Nilsen R, Garcia T. Diffractive optical elements formed on plastic surface and method of making US20040219464 2004.
Zeng H, Hou Y. A movable table guide and parallelism adjustment mechanism of single-column hydraulic machine CN203994835 2014.
Liu X. A fast parallel adjustment mechanism and its adjustment method CN104299654 2015.
Akahori S, Kambara N. Parallelism adjusting device and parallelism adjusting method US20140333334 2014.
Zhang L, Chen P, Du J, Xu D. Compensating device for correcting parallelism degree of two flat plates in relative motion CN104553040 2015.
Cao X, Fu J, Liu S. Pressure head depth of parallelism guiding mechanism CN205764777 2016.
Chaumel P, Lieven P. Device and method for maintaining parallelism between the two glazings of an aircraft double glazing US9428260 2016.
Xie W, Chen H, Guo C, Zhang Y. Robotic arm system and method for calibrating parallelism of the same CN105215990 2016.
Hsu SA. Parallelism control device applied to the dual-shaft system US9265166 2016.
Grosse P. Method of adjusting the parallelism of a fiber block with a chip surface US20180259727 2018.
San S. Articulated robot parallelism determination method and articulated robot inclination adjustment device WO2018173192 2018.
Xie Z, Xu S. Adaptive parallelism correction device and leveling module for digital light projection 3D printing CN206749056 2017.
Wang T, Chen K. Device and method for quickly adjusting parallelism between tool head and workpiece CN206749056 2017.
Liu G, Yu W, Wang T, Lu Z, Sun Q. An ultra-precision parallelism adjustment and detection system for electrostatic field induction technology CN103848393 2014.
Takashi U, Hisashi I, Hiroshi M. Device for adjusting relative parallelism of the detection unit CN102280518 2011.

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Article Details

Year: 2019
Page: [90 - 103]
Pages: 14
DOI: 10.2174/2212797612666190423142718
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