Experimental Investigation on Electrochemical Discharge Milling of Micro Structures on Quartz Glass

Author(s): Zhiyuan Wei, Yong Liu*, Songsong Li.

Journal Name: Recent Patents on Engineering

Volume 13 , Issue 3 , 2019

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Graphical Abstract:


Background: The fabrication of micro-groove and microstructures in non-conductive hard and brittle materials is always difficult. The electrochemical discharge milling process is a good selection for the fabrication of micro-grooves and microstructures.

Objective: In this paper, an electrochemical discharge milling process for fabricating micro-grooves is introduced. In order to investigate the influences of pulse voltage, pulse frequency, duty cycle and feed rate on machining accuracy and localization, the experiment of the microgrooves and microstructures was carried out.

Methods: Firstly, the electrochemical discharge milling set-up has been built based on the machining principle. Secondly, a discharge energy control model was established. Then, a series of experiments has been carried out to investigate the effect of applied voltage, frequency, duty factor, and feed rate on the groove width. An array of micro-grooves was obtained by the optimized parameters. Finally, some complex microstructures like micro-channels and 3D microstructures on glass were fabricated successfully.

Results: The groove width increases with the increase of machining voltage and duty cycle, the groove width decreases with the increase of pulse frequency and feed rate. Better machining localization can be obtained with the smaller voltage and duty cycle, the larger pulse frequency and feed rate.

Conclusion: Two-dimensional microchannel and three-dimensional microstructures have been successfully machined on the glass workpiece. It has some guiding significance for the fabrication of nonconductive hard brittle materials.

Keywords: Electrochemical discharge milling, micro groove, micro structures, quartz glass, discharge energy model, fabrication.

Z. Zheng, W. Cheng, and F. Huang, "3D microstructuring of Pyrex glass using the electrochemical discharge machining process", J. Micromech. Microeng., vol. 17, pp. 960-966, 2007.
Y. Zhan, R. Yuan, and Y. Luo, "Methods and systems for electromachining of a workpiece", WO Patent 2010078092, 2010.
B. Wei, M.S. Lamphere, and J.F. Wessels, "Electromachining process and apparatus", U.S. Patent 7394040, 2008.
Y. Zhan, R. Yuan, and G.M. Nelson, "Electroerosion control system and a dual mode control system", U. S. Patent 8560110, 2013.
B. Yan, K. Wu, and Y. Hsu, "Apparatus and Method for Magnetic Field Assisted Electrochemical Discharge Machining", U.S. Patent 08652307, 2014.
M.S. Han, K.W. Chae, and B. Min, "Fabrication of high-aspect-ratio microgrooves using an electrochemical discharge micro-milling process", J. Micromech. Microeng., vol. 27, pp. 4-12, 2017.
S. Elhami, and M.R. Razfar, "Analytical and experimental study on the integration of ultrasonically vibrated tool into the micro electro-chemical discharge drilling", Precision Engineering., vol. 47, pp. 424-433, January 2017.
N. Sabahi, M.R. Razfar, and M. Hajian, "Experimental investigation of surfactant-mixed electrolyte into electro chemical discharge machining (ECDM) process", J. Mater. Process. Technol., vol. 250, pp. 190-202, 2017.
F.D. Tohid, D. Ali, and W. Rolf, "Characterization and modeling of 2D-glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity", J. Micromech. Microeng., vol. 18, pp. 16-24, 2008.
N. Sathisha, S. H. Somashekhar, and J. Shivakumar, "Prediction of material removal rate using regression analysis and artificial neural network of ecdm process", Int. J. Rec. Adv. Mech. Eng., vol. 3, pp. 69-812014.
M. Hajian, and M.R. Razfar, "Experimental study of tool bending force and feed rate in ECDM milling", Int. J. Adv. Manuf. Technol., vol. 91, pp. 1677-1687, 2017.
M. Coteatǎ, L. Slǎtineanu, and O. Dodun, "Electrochemical discharge machining of small diameter holes", Int. J. Mater. Form., vol. 1, pp. 1327-1330, 2008.
M. Han, B. Min, and S.J. Lee, "Reduction of Overcut in the Electrochemical Discharge Machining Process Using a Side-insulated Electrode", International Conference on Smart Manufacturing Application, vol. Vol. 6, pp. 9-11, 2008.
M. Coteatǎ, C. Ciofu, and L. Slǎtineanu, "ESTABLISHING THE ELECTRICAL DISCHARGES WEIGHT IN ELECTROCHEMICAL DISCHARGE DRILLING", Int. J. Mater. Form., vol. 2, pp. 673-676, 2009.
C.S. Jawalkar, A.K. Sharma, and P. Kumar, "Micromachining with ecdm: Research Potentials and Experimental Investigations", J. Mech. Aerospace Indust. Mechatr. Manuf. Eng., vol. 6, pp. 340-345, 2012.
K. Nguyen, P.A. Lee, and B.H. Kim, "Experimental Investigation of ECDM for Fabricating Micro Structures of Quartz", Int. J. Precis. Eng. Manuf., vol. 16, pp. 5-12, 2015.
A. Behroozfar, and M.R. Razfar, "Experimental and Numerical Study of Material Removal in Electrochemical Discharge Machining (ECDM)", Mater. Manuf. Process., vol. 31, pp. 495-503, 2016.
X.D. Cao, B.H. Kim, and C.N. Chu, "Hybrid Micromachining of Glass Using ECDM and Micro Grinding", Int. J. Precis. Eng. Manuf., vol. 14, pp. 5-10, 2016.
S. Elhami, and M.R. Razfar, "Effect of ultrasonic vibration on the single discharge of electrochemical discharge machining", Mater. Manuf. Process., vol. 33, pp. 444-451, 2018.
S. Elhami, and M.R. Razfar, "Analytical and experimental study on the integration of ultrasonicallyvibrated tool into the micro electro-chemical discharge drilling", Precis. Eng., vol. 47, pp. 424-433, 2017.
T. Singh, and A. Dvivedi, "Developments in electrochemical dis-charge machining: A review on electrochemical discharge machining, process variants and their hybrid methods", Int. J. Mach. Tools Manuf., vol. 105, pp. 1-13, 2016.
S. Elhami, and M.R. Razfar, "Study of the current signal and material removal during ultrasonic-assisted electro chemical discharge machining", Int. J. Adv. Manuf. Technol., vol. 92, pp. 1591-1599, 2017.
X.D. Cao, B.H. Kim, and C.N. Chu, "Micro-structuring of glass with features less than 100 μm by electrochemical discharge machining", Precis. Eng., vol. 33, pp. 459-465, 2009.
M. Han, B. Min, and S.J. Lee, "Modeling gas film formation in electrochemical discharge machining processes using a side-insulated electrode", J. Micromech. Microeng., vol. 18, pp. 19-26, 2008.
K. Furutani, and H. Maeda, "Machining a glass rod with a lathe-type electro-chemical discharge machine", J. Micromech. Microeng., vol. 18, pp. 6-13, 2008.
C.J. Lu, A. Gu, and L. Meng, "The Micro-Milling Machining of Pyrex Glass Using the Electrochemical Discharge Machining Process", Advanced Materials Research, vol. Vol. 403-408, pp. 738-742, 2012.
Z. Lin, Y. Huang, and L. Chen, "Application of Electro-chemical Discharge Machining to Micro-Machining of Quartz", Adv. Mater. Res., vol. 939, pp. 161-168, 2014.
M. Wang, J. Zhang, and Y. Liu, "Investigation of Micro Electrochemical Discharge Machining Tool with High Efficiency", Recent Pat. Eng., vol. 10, pp. 146-153, 2016.
K. Inoue, "Electrical machining method and apparatus for forming a 3D surface contour in a workpiece with a traveling-wire electrode", U.S. Patent 4386248, 1983.
Q. Liu, J. Wang, and L. Li, "Calculation of Electric Spark Discharge Energy and Its Energy Loss", High Voltage Eng., vol. 40, pp. 1255-1260, 2014.
R. Wuthrich, and J. Ziki, Micromachining Using Electrochemical Discharge Phenomenon., 2nd ed United States: Elsevie, 2015.

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Article Details

Year: 2019
Page: [241 - 248]
Pages: 8
DOI: 10.2174/1872212112666180606091632
Price: $58

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