Shape Memory Alloys (SMAs), famous class of smart materials with unique functional and
intelligence properties, have attracted much attention in recent decades. These materials offer a potential
solution for microstructure devices due to their high mechanical performances, high power to weight
ratio, large deformation, biocompatibility, etc. Nickel-Titanium (NiTi) is the most applied SMAs thin
film due to its high recoverable strain and massive forces. Therefore, these high-performance materials
are able to make microactuators in Micro-Electro-Mechanical System (MEMS). This paper investigates
the recent development of material processing approaches for NiTi thin films and introduces various
types of MEMS applications such as microvalves, micropumps, microgrippers, microsensors, etc.