Parasitic Limitations of MOSFETs: Gate Fringe Capacitance, Silicided Source/Drain Resistance, and Threshold Voltage Shift Due to Impurity Penetration through a Thin Gate Oxide
Pp. 547-582 (36)
Parasitic capacitance and resistance associated with source/drain silicide
contacts are not scaled down, and they have a large influence on the device
characteristics considering the scaling effect. The fringe capacitance and source/drain
resistance are investigated in this chapter. Futher, the impact of B penetration through
gate oxide on threshold voltage is analyzed. As the device is scaled down, the impurities
in polycrystalline Si gate tend to penetrate the substrate through the thin gate oxide, and
the influence of the penetrated impurity to the shift of threshold voltage becomes
Conformal mapping, Effective length, Electric capacitance, Fringe
capacitance, Junction depth, Parasitic capacitance, Poisson integration,
Resistance, Silicide, SOI, source/drain.
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