Small non-ferromagnetic metal particle and ferromagnetic metal particle could be detected
with micro inductive sensor. However, the signal of the inductive sensor is very weak. In order to increase
the amplitude of the signal, the relation between the material of magnetic core and the sensitivity
of the micro planar inductive sensor is presented in this paper. Simulation models of the micro inductive
sensor with different magnetic cores are built with Ansoft software. The simulation results indicate
that the magnetic core with high permeability and high conductivity could improve the sensitivity of planar inductive
sensor for the detection of both iron particles and copper particles. The simulation results also indicate that the sensitivity
of detecting copper particles is increased with the increase in thickness of the iron magnetic core, but the sensitivity
of detecting iron particles is decreased with the increase in thickness of iron magnetic core. This paper also introduced the
recent patents which are designed to improve the sensitivity of inductive sensor. This research has reference value for the
design of inductive sensor.
Keywords: Eddy current, inductive sensor, magnetic core, metal particle detection, micro sensor, oil monitoring.
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