We developed a low-cost and high-resolution micro-fabrication system that enables quick
and inexpensive manufacturing of master molds for fabricating microfluidic devices via softlithography.
The system utilizes ultraviolet light-emitting diodes as a light source and dry film photoresists
as patterning materials. Compared to cleanroom methods of fabricating master molds, our
system demonstrates several advantages, including the ability to process in ambient air environments
and normal lighting conditions, low costs, ease of operation, and short processing time. Moreover, the
system achieves feature resolutions of 30 m, aspect ratios larger than 1, and sidewall angles larger
than 80o, which meet the requirements of a variety of microfluidic applications.
Keywords: Dry film resists, low-cost fabrication, master molds, MEMS, microfluidic devices, soft-lithography.
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