Theoretical Calculation of the Local Heating Effect on the Crystallization of TiO2 Prepared by Sparking Anodization
Sparks are frequently observed during dielectric breakdown on valve metal oxide films, and
several papers investigated their correlation with the oxide crystallization. In this work, the effect of
high temperature of a spark was studied using finite element method. An important result is that the
oxide area heated above the oxide fusion temperature is more than 50 times larger than the diameter of
the channel generated during the breakdown event, meaning that just a few numbers of sparks could
lead to a large area of oxide crystallization. Besides, the heated area is proportional to the spark temperature and to the oxide
thickness. Finally, using a factorial design, a cross effect was also detected between the channel temperature and the
barrier oxide thickness.
Keywords: Computer modeling and simulation, electrochemical properties, finite element analysis, oxides, thin films.
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