Ion Implantation and Activation

Volume: 3

Author(s): Kunihiro Suzuki

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Ion Implantation and Activation presents the derivation process of related models in a comprehensive step by step manner starting from the fundamental processes and moving up into the more advanced ...
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Preface  promotion: free to download

Pp. i-ii (2)

Kunihiro Suzuki



Acknowledgements  promotion: free to download

Pp. iii

Kunihiro Suzuki



Diffusion Under Thermal Equilibrium

Pp. 3-34 (32)

Kunihiro Suzuki


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Paring Diffusion Equation

Pp. 35-55 (21)

Kunihiro Suzuki


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Experimental Data Associated with Transient Diffusion

Pp. 56-82 (27)

Kunihiro Suzuki


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Simple Treatment of Transient Enhanced Diffusion

Pp. 83-100 (18)

Kunihiro Suzuki


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Thermal Oxidation

Pp. 101-119 (19)

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Segregation

Pp. 120-127 (8)

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Index  promotion: free to download

Pp. 205-207 (3)

Kunihiro Suzuki