Ion Implantation and Activation

Volume: 2

Author(s): Kunihiro Suzuki

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Ion Implantation and Activation presents the derivation process of related models in a comprehensive step by step manner starting from the fundamental processes and moving up into the more advanced ...
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Preface  promotion: free to download

Pp. i-ii (2)

Kunihiro Suzuki



Acknowledgements  promotion: free to download

Pp. iii-iv (2)

Kunihiro Suzuki



Ion Implantation Profile in Patterned Substrate

Pp. 3-17 (15)

Kunihiro Suzuki


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Ion Implantation Profile in Multi-Layer Structure

Pp. 54-68 (15)

Kunihiro Suzuki


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Dose Loss

Pp. 69-77 (9)

Kunihiro Suzuki


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Amorphous Layer Thickness

Pp. 78-120 (43)

Kunihiro Suzuki


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Recrystallization of Amorphous Layer

Pp. 121-128 (8)

Kunihiro Suzuki


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Redistribution of Impurities During Solid Phase Epitaxy

Pp. 129-142 (14)

Kunihiro Suzuki


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Activation of Ion Implanted Impurities

Pp. 143-162 (20)

Kunihiro Suzuki


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Index  promotion: free to download

Pp. 163-165 (3)

Kunihiro Suzuki