Ion Implantation and Activation

Volume: 1

Author(s): Kunihiro Suzuki

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Ion Implantation and Activation presents the derivation process of related models in a comprehensive step by step manner starting from the fundamental processes and moving up into the more advanced ...
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Foreword  promotion: free to download

Pp. i-ii (2)

Robert W. Dutton



Preface  promotion: free to download

Pp. iii-v (3)

Kunihiro Suzuki



Acknowledgements  promotion: free to download

Pp. vi-vii (2)

Kunihiro Suzuki



Selection of Impurities

Pp. 3-7 (5)

Kunihiro Suzuki


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Physics of Ion Implantation

Pp. 8-91 (84)

Kunihiro Suzuki


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Monte Carlo Simulation

Pp. 92-120 (29)

Kunihiro Suzuki


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Analytical Model for Ion Implantation Profiles

Pp. 121-167 (47)

Kunihiro Suzuki


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Pearson Function Family

Pp. 168-222 (55)

Kunihiro Suzuki


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Lateral Distribution

Pp. 266-301 (36)

Kunihiro Suzuki


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LSS Theory

Pp. 302-375 (74)

Kunihiro Suzuki


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Quasi Crystal LSS Theory

Pp. 376-398 (23)

Kunihiro Suzuki


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Simplified LSS Theory

Pp. 399-451 (53)

Kunihiro Suzuki


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Index  promotion: free to download

Pp. 452-455 (4)

Kunihiro Suzuki