Micro and Nanosystems

N.-T. Nguyen  
Queensland Micro- and Nanotechnology Centre 
QMF building (N74 Room 1.04)
Griffith University
West Creek Road, Nathan Qld 4111
Email: nam-trung.nguyen@griffith.edu.au


Fabrication of Nano Electrodes based on Liquid Membrane Electrochemical Etching

Author(s): Yongbin Zeng, Xiujuan Wu, Ningsong Qu and Di Zhu

Affiliation: College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China.


Electrochemical machining has the potential to allow machining at the nanometer scale. A nano electrode is an essential tool in nano-electrochemical machining. In this paper, the mechanism of liquid membrane electrochemical etching is studied, and a processing platform is developed. The processing voltage, initial tungsten diameter and electrolyte concentration are control factors in nano electrode fabrication. An orthogonal experiment was conducted using these three processing parameters. Experimental results showed that the electrolyte concentration had the most significant effect on nano electrode fabrication, where the optimal machining parameters are the following: processing voltage of 6 V, initial tungsten diameter of 200 m and potassium hydroxide electrolyte concentration of 1 mol/L. Using these optimal machining parameters, an 85 nanometers diameter tool electrode with an aspect ratio of 20 was obtained in several minutes. Successful nano electrode fabrication provides technological support and a theoretical basis for future research in nanoelectrochemical machining.

Keywords: Nano electrode, nano-electrochemical machining and liquid membrane.

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Article Details

Page: [261 - 266]
Pages: 6
DOI: 10.2174/18764029113059990001