Silicon Based Thin Film Solar Cells

Silicon Based Thin Film Solar Cells explains concepts related to technologies for silicon (Si) based photovoltaic applications. Topics in this book focus on ‘new concept’ solar cells. These kinds ...
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Sputtering of Thin Films

Pp. 58-80 (23)

Paolo Rava

Abstract

Sputtering is one of the most widely used techniques for deposition of thin films. This chapter reviews the physical foundations of sputtering in a plasma and its application to the deposition of thin films. Different sputtering techniques are described and their advantages and disadvantages are highlighted.

Keywords:

Sputtering, plasma, glow discharge, thin films, magnetron cathode, ion beam, deposition, targets, ionization, gases

Affiliation:

Elettrorava SpA, Via Don Sapino 176, 10078 Venaria, Torino, Italy