Getter Films for Small Vacuum Chambers
Sergey P. Yatsenko,
Konstantin A. Chuntonov.
This patent review analyzes the state of the developments related to getter films intended for vacuum opto- and
microelectronics. With current production technology, high hermiticity of the packages and high sorption efficiency of the
getter films cannot be achieved simultaneously. A new classification of getter films is suggested in this paper, prompting a
new approach to the problems associated with vacuum for small sealed-off chambers. An acceptable price-reliability ratio
of vacuum devices can be obtained by combining low temperature (not higher than 150°C) sealing methods with reactive
getter films that have high sorption capacity.
Keywords: Classification of getters, getter reactive films, low temperature sealing, MEMS, microelectronic packages, vacuum, Getter Films, Film Structure, Vacuum Device, Barium Micro-Dispenser
Rights & PermissionsPrintExport